ESPEC CLEAN OVEN MODEL PVC-231M 클린드라이오븐
상태양호
헤파필터 장착됨
전원 AC220 3상
연락처 011-354-6248



CLEAN OVEN PVC-231M

Used extensively in baking heat treatment/drying of semiconductor wafers liquid crystals disks and other components and devices requiring clean air conditions.

In addition to the standard instrumentation which offers two-step programming the M-instrumentation allows programmed operation in up to 18 steps.

Class 100 cleanliness is achieved by employing a HEPA filter and a back-to-front laminar circulation system.

The high-performance model (PVHC model) provides stable performance even during heat-up or cooling at high temperatures of 150°C(+302°F) or more.

Compatible with the chamber network E-BUS system.



syetem: back-to-front horizontal laminar circulation system
power supply: 220 3p
max power: 6.4kVA
temperature range: (ambient) +60 to 200 C
filter: heat-resistant HEPA filter
inside capacity: 380L
inside dimensions: 580*1130*580 (W*H*D)
outside dimensions: 770*1880*1025 (W*H*D)
WEIGHT: 300Kg






http://www.espec.co.jp/english/products/env-test/pvc/index.html
http://www.espec.co.jp/english/inquiry/pdf/clean_o2.pdf